ALEXANDRIA, Va., May 1 -- United States Patent no. 11,973,441, issued on April 30, was assigned to Board of Regents, The University of Texas System (Austin, Texas).
"MEMS nanopositioner and method of fabrication" was invented by Seyed Omid Reza Moheimani (Allen, Texas), Afshin Alipour (Richardson, Texas) and Mustafa Bulut Coskun (Pasadena, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between ...